MEMS Pressure Sensor
This MEMS pressure sensor is a high-temperature, high-precision device based on the silicon piezoresistive principle, delivering reliable performance in demanding dynamic fluid environments. It is widely used in wind tunnel pressure testing, explosion shock wave measurement, aircraft flight testing, point-explosion experiments, shock tube applications, and other scenarios requiring fast, accurate pressure response.
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| Type Number | DY8127 | DY8114 | DY8827 |
| Description |
Compact type, Easy to install High precision, Output stabilization High resonance frequency |
Separate transmission Stainless steel case Hermetic seal receptacle High precision and stable output Good resistance to electromagnetic interference |
Small size (Φ 2.4mm) Surface mount SOI high temperature resistant technology High precision and stable output High resonance frequency |
| Type | Silicon piezoresistive, absolute pressure | Silicon piezoresistive + amplifier | Silicon piezoresistive, absolute pressure/gauge pressure |
| Pressure Measurement Range | 0~0.1 MPa, …4.5 MPa | 0~0.1 MPa, …4.5 MPa | 0~105 kPa, …350 kPa |
| Power Supply | 10 VDC, Max.15 VDC | 108 VDC ~ 36 VDC | 10 VDC, Max.15 VDC or Max.7.5 mA |
| Output Range | 0~100 mV | 0.5 ~ 4.5 mV | 0~100 mV |
| Temperature Range | -55 ~ 175 ℃ |
Amp: -30 ~ 80 ℃ Probe: -55 ~ 260 ℃ |
-55 ~ 125 ℃ |
| Non-linearity | ≤ ±0.1% FS | NA | ≤ ±0.15% FS |
| Temperature Drift/Error |
Drift: ≤ ±0.03% FS/℃ Any 55 ℃ range: ≤ ±0.02% FS/℃ |
≤ ±0.5% FS | ≤ ±0.15% FS |
| Sealing Type | 10-32 UNF-2A THD external thread + seal | NA | Surface Mount |
| Weight | ≤ 5 g | ≤ 200 g | ≤ 1 g |
| Dimension | 26.5 × (9.4 mm) | 55.0 × 86.7 × 33.0 mm | 9.5 × Φ2.4 mm |
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| Type Number | DY8010 | DY8030 | DY8034 |
| Description |
SOI high temperature resistant technology Compact type, Easy to install, High precision, Output stabilization, High resonance frequency |
SOI high temperature resistant technology Compact type, Easy to install, High precision, Output stabilization, High resonance frequency |
SOI high temperature resistant technology Compact type, Easy to install, High precision, Output stabilization, High resonance frequency |
| Type | Silicon piezoresistive, absolute pressure | Silicon piezoresistive, absolute pressure | Silicon piezoresistive, absolute pressure |
| Pressure Measurement Range | 0~0.1 MPa, …4.5 MPa | 0~10 MPa, …60 MPa | 0~10 MPa, …60 MPa |
| Power Supply | 10 VDC, Max.15 VDC | 10 VDC, Max.15 VDC or Max.7.5 mA |
10 VDC, Max.15 VDC or Max.7.5 mA |
| Output Range | 0~100 mV | > 80 mV (Or customed) | 0~100 mV |
| Temperature Range | -55 ~ 175°C | -55 ~ 175°C | -55 ~ 175°C |
| Non-linearity | ≤ ±0.1% FS | ≤ ±0.1% FS | ≤ ±0.1% FS |
| Temperature Drift/Error |
Drift: ≤ ±0.03% FS/°C Any 55°C range: ≤ ±0.02% FS/°C |
Drift: ≤ ±0.08% FS/°C (uncompensated) |
Error (0°C~85°C): ±2%FSO Error (Others): ±3%FSO |
| Sealing Type | M5×0.8 external thread + seal | M5×0.8 external thread + seal | M10×1 external thread + seal |
| Weight | ≤ 6 g | ≤ 20 g | ≤ 20 g |
| Dimension | 27.8 × Φ9.5 mm | 29.7 × Φ15.9 mm | 29.7 × Φ15.9 mm |
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| Type Number | DY8010HT | DY8878 | DY8100/DY8999 |
| Description |
SOI high temperature resistant technology Compact type, Easy to install High precision, Output stabilization High resonance frequency |
Small size (thickness 2mm) Surface mount SOI high temperature resistant technology High precision and stable output High resonance frequency |
Compact type Easy to install SOI high temperature resistant technology High precision and stable output Light weight |
| Type | Silicon piezoresistive, absolute pressure | Silicon piezoresistive, absolute pressure/gauge pressure | Silicon piezoresistive |
| Pressure Measurement Range | 0~0.1 MPa, …4.5 MPa | 0~0.2 MPa, …5.0 MPa | 0~2.1 MPa/0~0.7 MPa |
| Power Supply | 10 VDC, Max.12 VDC | 10 VDC, Max.15 VDC or Max.7.5 mA | 10V DC |
| Output Range | 0~100 mV | 0 ~ 100 mV | 0~100 mV |
| Temperature Range | -55 ~ 260 °C | -55 ~ 150 °C | -55 ~ 175 °C |
| Non-linearity | ≤ ±0.1% FS | ≤ ±0.1% FS | ≤ ±0.1% FS |
| Temperature Drift/Error | Drift: ≤ ±0.03% FS/°C | ≤ ±0.1% FS | -0.5% FS ~ +0.5% FS |
| Sealing Type | M5x0.8 external thread + seal | Surface Mount | O Seal |
| Weight | ≤ 6 g | ≤ 1 g | ≤ 20 g |
| Dimension | 28.4 X Φ9.5 mm | 6.2 X 3.0 X 1.5 mm | 49.2 X Φ14 mm |
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| Type Number | DY8998/CY8997 | DY8889 | DY8101HT |
| Description |
Compact type Easy to install SOI high temperature resistant technology High precision and stable output Light weight |
High precision The whole temperature zone is better than 0.1%FS Flexible design Can be installed on curved surfaces CAN digital signal output |
High temperature gas pressure measurement A wide range of temperature measurements Fully sealed construction |
| Type | Silicon piezoresistive | Silicon piezoresistive, absolute pressure | Silicon piezoresistive, absolute pressure |
| Pressure Measurement Range | 0~10 MPa / 0~1.7 MPa | 0~105 kPa | 0~350 kPa |
| Power Supply | 10 VDC | 28 VDC / (24~32) VDC | (10±0.01) VDC |
| Output Range | 0~100 mV | CAN, 32bit (unsigned integer) | ≥ 50 mV |
| Temperature Range | -55 ~ 273 ℃ | -55 ~ 70 ℃ | -55 ~ 300 ℃ |
| Non-linearity | ≤ ±0.1% FS | ≤ ±0.1% FS | ≤ ±0.5% FS |
| Temperature Drift/Error | ≤ ±0.5% FS | ≤ ±0.1% FS |
Thermal zero drift: ±1.5% FS/100°F (55°C) Thermal sensitivity drift: ±1.5% FS/100°F (55°C) |
| Sealing Type | Copper Ring | NA | Copper Gasket |
| Weight | ≤ 5 g | NA | ≤ 110 g |
| Dimension | 26.4 X Φ9.5 mm | 450.0 X 50.0 mm | 51.4 X Φ9.5 mm |