MEMS Capacitance Accelerometers

MEMS Capacitance Accelerometers

MEMS capacitance accelerometers use high-sensitivity capacitive sensing technology to detect DC and low-frequency constant acceleration. With industry-leading noise performance, low nonlinearity, and minimal drift, these sensors ensure stable and accurate measurements. They are widely used in applications such as flight flutter testing, tilt and attitude monitoring, elevator motion evaluation, and other scenarios requiring reliable static and dynamic acceleration measurement.

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MEMS Capacitance Accelerometers
Model Number DA4002-2 DA4002-5 DA4003-2 DA4003-5 DA4003-10 DA4003-30 DA4003-50 DA4003-100 DA4003-200
Measurement Range ±2 g ±5 g ±2 g ±5 g ±10 g ±30 g ±50 g ±100 g ±200 g
Sensitivity 400 mV/g 100 mV/g 1350 mV/g 540 mV/g 270 mV/g 90 mV/g 54 mV/g 27 mV/g 13.5 mV/g
Frequency Response (±3dB) 0 - 1200 Hz 0 - 1200 Hz 0 - 1100 Hz 0 - 1900 Hz 0 - 3200 Hz 0 - 4000 Hz 0 - 4500 Hz 0 - 5000 Hz 0 - 7000 Hz
Non-linearity ±0.1% ±0.1% ±0.1% ±0.1% ±0.1% ±0.1% ±0.1% ±0.1% ±0.1%
Offset Calibration ±8 mV ±2 mV ±5 mV ±5 mV ±5 mV ±5 mV ±5 mV ±5 mV ±5 mV
Temperature Coefficient of Offset ±0.15 mg/°C ±0.15 mg/°C ±0.2 mg/°C ±0.5 mg/°C ±1 mg/°C ±3 mg/°C ±5 mg/°C ±10 mg/°C ±20 mg/°C
Temperature Coefficient of Sensitivity ±100 ppm/°C ±100 ppm/°C 120 ppm/°C 120 ppm/°C 120 ppm/°C 120 ppm/°C 120 ppm/°C 120 ppm/°C 120 ppm/°C
Cross Axis Sensitivity ±2% ±2% ±2% ±2% ±2% ±2% ±2% ±2% ±2%
Noise Density 20ug/√Hz 20ug/√Hz 7ug/√Hz 18ug/√Hz 35ug/√Hz 100ug/√Hz 170ug/√Hz 350ug/√Hz 680ug/√Hz
Operating Voltage 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC 5VDC - 32VDC
Operating Current 2.6mA 2.6mA 4mA 4mA 4mA 4mA 4mA 4mA 4mA
Operating Temperature -40°C - 125°C -40°C - 125°C -55°C - 125°C -55°C - 125°C -55°C - 125°C -55°C - 125°C -55°C - 125°C -55°C - 125°C -55°C - 125°C
Type of Output Single-ended Single-ended Single-ended or differential Single-ended or differential Single-ended or differential Single-ended or differential Single-ended or differential Single-ended or differential Single-ended or differential
Output Common Mode Voltage 0.9VDC 0.9VDC 1.65VDC 1.65VDC 1.65VDC 1.65VDC 1.65VDC 1.65VDC 1.65VDC
Weight 8 g 8 g 12 g 12 g 12 g 12 g 12 g 12 g 12 g
Dimension 25.4×21.6×7.6 mm 25.4×21.6×7.6 mm 25.4×21.6×9.5 mm 25.4×21.6×9.5 mm 25.4×21.6×9.5 mm 25.4×21.6×9.5 mm 25.4×21.6×9.5 mm 25.4×21.6×9.5 mm 25.4×21.6×9.5 mm
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